Table Sorter
Custom miniaturized design for integration into industrial microscopes and AOI systems, as well as other applications requiring transfer from the wafer cassette,
Main Functions.
- Wafer transfer
- Edge Alignment
- Giant viewer inspection: 360 degree selectable rotation
- Wafer back inspection: reversible
Functional Features
- Applied to third generation semiconductor materials
- Overcome edge alignment of transparent and translucent materials
- Transferable to thin wafers (>80um)
Application Method
- Can be used with various devices for transmission such as
- Desktop microscopes
- 3D measurement equipment
- Film thickness measurement
- Wafer AOI equipment
- 4PP probe measurement equipment
- Lithography Equipment