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High speed sorter3
Home Products EFEM System High speed sorter
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High speed sorter

Specially designed for high-speed sorting needs, more than 30% more efficient than traditional equipment

 

Main functions.

  • Wafer sorting
  • Edge Alignment
  • OCR Readout

Features

  • Optimized space, 1/2 of conventional equipment
  • Highly efficient operation, 30% higher throughput
  • SEC/GEN support
  • Apply to 3rd generation semiconductor materials
  • Overcome edge-seeking alignment of transparent and translucent materials

 

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