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  • Wafer EFEM System

    Wafer handling by robot, product sorting and transfer, with various standard wafer cassettes and sizes available


  • Table Sorter

    Custom miniaturized design for integration into industrial microscopes and AOI systems, as well as other applications requiring transfer from the wafer cassette,


  • High speed sorter

    Specially designed for high-speed sorting needs, more than 30% more efficient than traditional equipment


  • Wafer Inspection System

    Microscopic measurement of wafers before and after the manufacturing process, and optical defect detection of wafer surface.


  • 3D measurement system

    2D precision measurement and 3D contour measurement of various products through optical inspection technology