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Wafer EFEM System
Wafer handling by robot, product sorting and transfer, with various standard wafer cassettes and sizes available
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Table Sorter
Custom miniaturized design for integration into industrial microscopes and AOI systems, as well as other applications requiring transfer from the wafer cassette,
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High speed sorter
Specially designed for high-speed sorting needs, more than 30% more efficient than traditional equipment
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Wafer Inspection System
Microscopic measurement of wafers before and after the manufacturing process, and optical defect detection of wafer surface.
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3D measurement system
2D precision measurement and 3D contour measurement of various products through optical inspection technology
others